Our key experimental facilities in graphene research are formed by the Otaniemi Research Infrastructure for Micro- and Nanotechnologies (OtaNano, http://www.otanano.fi/). OtaNano houses a wide variety of processes and equipment for micro and nano fabrication, sample imaging and characterization, and ultra-low-temperature conductivity and high-frequency measurements. The OtaNano facilities are formed of Micronova (http://www.micronova.fi/), Low Temperature Laboratory (LTL, http://ltl.aalto.fi/), and Nanomicroscopy Center (NMC, http://nmc.aalto.fi/). All the facilities are located in one campus area at Otaniemi, Espoo, to provide maximum ease of use.
Micronova facilities run jointly with VTT include a 2600 m2 clean room with dedicated production lines for nanotechnology, MEMS, CMOS, and photonics technology. The clean room contains two, modern e-beam lithography systems, our photothermal CVD growth setup, and in addition a new CVD system will be installed soon.
Low Temperature Laboratory houses top of the line refrigeration setups with versatile, low-noise microwave measurement capabilities. Materials analysis and quality control of nanodevices can be done at the Nano Microscopy Center and the adjoining characterization facilities.
OtaNano is is an open access RI, operated by Aalto University and VTT, and available for academic and commercial users internationally. High level of support is provided for the users of OtaNano by senior and staff scientists of Aalto University.